Ultra Fine Leak Test System
MUH-0100 series
PAT.NO.5970618
This system conducts airtight testing by fine leak testing (Vacuum Chamber Method) and ultra-fine leak testing (the Capsule-Accumulation Method).
●Measurable minimum 4×10⁻¹⁵Pa･ｍ³/s（He）with leak test of the Capsule-Accumulation Method.
Basic Specifications
Leak Determination Level
Testing is possible down to 4×10⁻¹⁵ Pa･m³/s (He)
Test Parts Size
～Φ44×D31 mm（30square）
pplicable Test Parts
MEMS parts (pressure sensors, acceleration sensors, angular velocity sensors, infrared image sensors), electronic parts, hermetic packages, crystal device, etc.
Power Source / Power Consumption
AC100V±10% single-phase 50/60Hz / 800VA
Pneumatic Pressure Source
0.35MPa or above～0.6MPa or below
Chamber Cleaning Gas
Dry Nitrogen or Argon gas：Purity: 99.99% or more
0.1MPa or above～0.5MPa or below
External Dimensions (Unit:mm)
W760×D770×H1200
Mass
200kg
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