MUH-0100 Series
Ultra Fine Leak Test System
Product Description
This system conducts airtight testing by fine leak testing (Vacuum Chamber Method) and ultra-fine leak testing (the Capsule-Accumulation Method).
| Leak Determination Level | Testing is possible down to 4×10-15 Pa・m3/s (He) |
|---|---|
| Test Parts Size | Φ44×L31 mm(angle 30×30) |
| Applicable Test Parts | MEMS parts (pressure sensors, acceleration sensors, angular velocity sensors, infrared image sensors), electronic parts, hermetic packages, crystal device, etc. |
| Power Source | AC 100 V |
| External Dimensions (Unit:mm) | W760×D770×H1200 |
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